{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications (Fundamentals of Microfabrication and Nanotechnology)","author_name":"Marc J. Madou","thumbnail_url":"https://www.ebooknetworking.net/books/B00/8IJ/bigB008IJM1C0.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-B008IJM1C0.html\">From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications (Fundamentals of Microfabrication and Nanotechnology)</a>","width":400,"height":300}