{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Scaleable Process for CVD of Large-Area Heteroepitaxial Beta Sic on Tic(x) Using Gases with 1:1 Silicon to Carbon Stoichiometry","author_name":"Richard Koba","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-B00DD7BLKA.html\">Scaleable Process for CVD of Large-Area Heteroepitaxial Beta Sic on Tic(x) Using Gases with 1:1 Silicon to Carbon Stoichiometry</a>","width":400,"height":300}