{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set. CRC Press. 2011.","author_name":"MARC J.. MADOU","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-B00DHKW4W2.html\">Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set. CRC Press. 2011.</a>","width":400,"height":300}