{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"DC Magnetron Reactive Sputtering of Low Stress AlN Piezoelectric Thin Films for MEMS Application","author_name":"Peter Y. Hsieh","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-B00J4FP8T0.html\">DC Magnetron Reactive Sputtering of Low Stress AlN Piezoelectric Thin Films for MEMS Application</a>","width":400,"height":300}