{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology) by Sugawara, M. (1998) Hardcover","author_name":"M. Sugawara","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-B010WFK3F4.html\">Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology) by Sugawara, M. (1998) Hardcover</a>","width":400,"height":300}