{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology) by M. Sugawara (1998-07-30)","author_name":"M. Sugawara;","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-B019NE10X4.html\">Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology) by M. Sugawara (1998-07-30)</a>","width":400,"height":300}