{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Glow Discharge Processes: Sputtering and Plasma Etching by Brian Chapman (1980-09-25)","author_name":"Brian Chapman","thumbnail_url":"https://www.ebooknetworking.net/books/B01/A1O/bigB01A1O60UI.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-B01A1O60UI.html\">Glow Discharge Processes: Sputtering and Plasma Etching by Brian Chapman (1980-09-25)</a>","width":400,"height":300}