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Magnetron sputtering system. Kn. 1. Introduction to the physics and technology of magnetron sputtering / Magnetronnye raspylitelnye sistemy. Kn. 1. Vvedenie v fiziku i tekhniku magnetronnogo raspyleniya

Magnetron sputtering system. Kn. 1. Introduction to the phy…

By: A. Kuzmichev

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