A User's Guide to Vacuum Technology
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Book Details
Author(s)John F. O'Hanlon
PublisherWiley-Interscience
ISBN / ASIN0471812420
ISBN-139780471812425
MarketplaceFrance 🇫🇷
Description ▲
An introduction to the theory and practice of modern vacuum technology, with applications. Focuses on the understanding, operation, and selection of equipment for vacuum processes used in semiconductor, optical, and related technologies. This 2nd Edition has new information on components, lubrication, pump fluids, and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system.