Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)

Copublished with IEE. The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

Contents

- Preface
- Introduction
- Optical Lithography
- Electron Beam Lithography
- X-ray Lithography
- Deep-UV Resist Technology
- Photomask fabrication procedures and limitations
- Metrology Methods in Photolithography
- Optical Lithography Modeling
- Issues in Nanolithography for Quantum Effect Device Manufacture
- Index