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Plasma etching and reactive ion etching (American Vacuum Society monograph series)

Author J. W Coburn
Publisher American Institute of Physics
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Book Details
Author(s)J. W Coburn
PublisherAmerican Institute of Physics
ISBN / ASIN0883184060
ISBN-139780883184066
Sales Rank6,096,993
MarketplaceUnited States 🇺🇸