Design of atmospheric pressure plasma CVD process for deposition of silicon nitride thin films using dielectric barrier discharge.

Name: Design of atmospheric pressure plasma CVD process for deposition of silicon nitride thin films using dielectric barrier discharge.
Author: Shunfu Hu
ISBN: 9781243426802

Author Shunfu Hu

Publisher Proquest, Umi Dissertation Publishing

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Book Details

Author(s)Shunfu Hu

PublisherProquest, Umi Dissertation Publishing

ISBN / ASIN1243426802

ISBN-139781243426802

Sales Rank12,433,759

MarketplaceUnited States 🇺🇸

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Book by Hu, Shunfu