This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style.
Introductory MEMS: Fabrication and Applications
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Book Details
Author(s)Thomas M. Adams, Richard A. Layton
PublisherSpringer
ISBN / ASIN1489984216
ISBN-139781489984210
AvailabilityUsually ships in 24 hours
Sales Rank5,059,087
MarketplaceUnited States 🇺🇸