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Copper Interconnect Technology

Author Tapan Gupta
Publisher Springer
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Book Details
Author(s)Tapan Gupta
PublisherSpringer
ISBN / ASIN1489985115
ISBN-139781489985118
MarketplaceFrance 🇫🇷

Description

In this book, a leader in the field describes advanced laser systems with lower radiation wavelengths, photolithography materials, and mathematical modeling approaches to address the challenges of Cu-interconnect technology.