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Lithography (ISTE)

Publisher Wiley-ISTE
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Book Details
PublisherWiley-ISTE
ISBN / ASIN184821202X
ISBN-139781848212022
AvailabilityUsually ships in 2 to 4 weeks
Sales Rank4,524,545
MarketplaceUnited States 🇺🇸

Description

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.

This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.