Semiconductor Exhaust Ventilation Guidebook

Name: Semiconductor Exhaust Ventilation Guidebook
Author: D. Jeff Burton
ISBN: 9781883992088

Author D. Jeff Burton

Publisher IVE Press, Inc ,U.S.

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Book Details

Author(s)D. Jeff Burton

PublisherIVE Press, Inc ,U.S.

ISBN / ASIN1883992087

ISBN-139781883992088

AvailabilityUsually ships in 24 hours

Sales Rank4,863,116

MarketplaceUnited States 🇺🇸

Description ▲

1st Edition. Complete guidance to exhaust ventilation in unique SC wafer fab applications; provides guidelines for establishing inhouse standards of good practice, training programs, and design. SI and US units. 27 charts, 5 forms, 6 checklists, 2 specifications.