Strain Gauges: Fabrication Processes and Techniques

Pressure measurement using a strain gauge bonded with epoxy adhesive to a metallic mechanical support has been, and still is, extensively employed, however, for some applications the use of an epoxy is inadequate. There is therefore particular interest in the use of thin film techniques to vacuum deposit strain gauges directly on metallic substrates. Such devices are highly cost effective when produced in large quantities due to the manufacturing techniques involved. This makes them ideally suited for use in large-volume products such as electronic weighing scales and pressure transducers. In this book, techniques for fabricating thin film vapour deposited strain gauge transducers on metal substrates for application as pressure sensors in industry are developed. CONTENTS: Thin Film Strain Gauge Transducers; Thin Film Interfaces, Insulation and Multi-layers; Thin Film Deposition and Analysis; Substrate and Mask Preparation; Insulator and Strain Gauge Coatings; Transducer Measurements; Single and Multi-layered Gauges; Load Cell Washer; References.