Development of Advanced Endpoint Detection and Process Control for Chemical Mechanical Polishing (CMP) in VLSI Circuit Fabrication (Berichte Aus Der Halbleitertechnik)

Name: Development of Advanced Endpoint Detection and Process Control for Chemical Mechanical Polishing (CMP) in VLSI Circuit Fabrication (Berichte Aus Der Halbleitertechnik)
Author: Gotz Springer
ISBN: 9783826578052

Author Gotz Springer

Publisher Shaker Verlag GmbH, Germany

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Book Details

Author(s)Gotz Springer

PublisherShaker Verlag GmbH, Germany

ISBN / ASIN3826578058

ISBN-139783826578052

Sales Rank12,899,598

MarketplaceUnited States 🇺🇸