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Structure Evolution, Properties, and Application of Alumina Films Deposited by PECVD

Author Denis Kurapov
Publisher Shaker Verlag GmbH, Germany
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Book Details
Author(s)Denis Kurapov
PublisherShaker Verlag GmbH, Germany
ISBN / ASIN3832241760
ISBN-139783832241766
Sales Rank99,999,999
MarketplaceUnited States 🇺🇸