Surface Plasmon Resonance Based MEMS Displacement Sensors: Design,Fabrication and Characterization

Strong dependence of surface plasmon resonance (SPR) on coupling parameters offers new varieties of sensing mechanisms in nano and micro-scale engineering fields. In this study, design, fabrication and characterization of MEMS displacement sensors that utilize angular dependence of grating coupled SPR condition are explored. Several surface plasmon polariton (SPP) excitation mechanisms are reported in the academic literature. One of them which is quite adaptable to microelectromechanical systems is grating coupling scheme. In this scheme, thin metallized grating structures are particularly designed depending on the desired wavelength and the angle of incidence of the SPP excitation light. Various lithographic techniques (nanoimprint, electron beam and optical lithography) are used to nanofabricate those certainly defined gratings. MEMS displacement sensor designs relying on the principle of angular displacement detection scheme are developed. In addition, a MEMS accelerometer design with plasmonic readout with nano-G noise floor is presented. Novel arrayed sensors combining the sensitivities of plasmon resonance and micromembrane type sensors may provide unprecedented performance.