Mems And Moems Technology And Applications

This book, written by experts in the field, combines useful details in design and process. It can be utilized as a reference book or a textbook on the subject. It covers all aspects of mems and moems technologies such as: mems/moems technology capabilities and trends operation and design of mems/moems devices optical microsystem modeling and simulation the digital micromirror device a micro-optical electromechanical device for display applications optical waveguides and silicon-based micromachined architectures silicon micromachines in optical communications networks: tiny machines for large systems assembly and test for mems and optical memsmems, microsystems, and micromachines: commercializing an emergent disruptive technology