Oxide Reliability: A Summary of Silicon Oxide Wearout, Breadown, and Reliability (Selected Topics in Electronics and Systems)

A summary of the state of our knowledge of oxide reliability. The articles have been written by experts in the field. The work should be useful to reliability engineers and manufacturing engineers, helping them to produce and characterize reliable oxides. It can be used as an introduction for new engineers interested in oxide reliability, besides being a reference for engineers already engaged in the field.