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Inorganic acid emission factors of semiconductor manufacturing processes.(Technical Paper): An article from: Journal of the Air & Waste Management Association

Author HungMin Chein, Tzu Ming Chen, Shankar Gopala Aggarwal, Chuen-Jinn Tsai, Chun-Chao Huang
Publisher Air and Waste Management Association
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Book Details
ISBN / ASINB000823XWM
ISBN-13978B000823XW7
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Description

This digital document is an article from Journal of the Air & Waste Management Association, published by Air and Waste Management Association on February 1, 2004. The length of the article is 5052 words. The page length shown above is based on a typical 300-word page. The article is delivered in HTML format and is available in your Amazon.com Digital Locker immediately after purchase. You can view it with any web browser.

Citation Details
Title: Inorganic acid emission factors of semiconductor manufacturing processes.(Technical Paper)
Author: HungMin Chein
Publication:Journal of the Air & Waste Management Association (Refereed)
Date: February 1, 2004
Publisher: Air and Waste Management Association
Volume: 54 Issue: 2 Page: 218(11)

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