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ISO 14644-1:1999, Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness

Author ISO TC 209/WG 1
Publisher Multiple. Distributed through American National Standards Institute (ANSI)
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Book Details
ISBN / ASINB000XYTJOG
ISBN-13978B000XYTJO2
MarketplaceFrance 🇫🇷

Description

This part of ISO 14644 covers the classification of air cleanliness in cleanrooms and associated controlled environments exclusively in terms of concentration of airborne particles. Onlyparticlepopulationshavingcumulativedistributionsbased on threshold (lower limit) sizes ranging from 0,1 ?m to 5 ?m are considered for classification purposes.This part of ISO 14644 does not provide for classification of particle populations that are outside of the specified particle size range, 0,1 ?m to 5 ?m. Concentrations of ultrafine particles (particles smaller than 0,1 ?m) and macroparticles (particles larger than 5 ?m) may be used to quantify these populations in terms of U descriptors and M descriptors, respectively.This part of ISO 14644 cannot be used to characterize the physical, chemical, radiological, or viable nature of airborne particles.