Process Engineering Analysis in Semiconductor Device Fabrication: Solutions Manual

Written primarily for chemical engineering students, this is the solutions manual to the text, which is an extension of upper level chemical engineering courses. Covering a range of processes in semiconductor device fabrication, the authors try to present traditional chemical engineering methodology in a non-traditional context. The text covers such topics as crystal growth and filtration and contains over 300 worked examples and problems. This material is only available to lecturers.