The Physics of Micro/Nano-Fabrication (Microdevices)
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Book Details
Author(s)
Ivor Brodie, Julius J. Muray
Publisher
Springer
ISBN / ASIN
0306441462
ISBN-13
9780306441462
Marketplace
France 🇫🇷
Description
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
