Inertial Microsensors (MEMS Reference Shelf)

This excellent volume lays out methods for the analysis and design of inertial micromachined sensors. The aim of the book is to provide readers with a solid foundation in the theory of inertial measurement, introduce them to design fundamentals, and provide them with design recipes for implementation of inertial instruments on the micro-scale. All of the discussions in the book are supported by constructive computational examples illustrating the material.