EUV Lithography
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Book Details
Author(s)
Vivek Bakshi
Publisher
Wiley
ISBN / ASIN
0470471557
ISBN-13
9780470471555
Marketplace
Canada 🇨🇦
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Description
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
