Microstereolithography and other Fabrication Techniques for 3D MEMS

This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS. This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields. It provides: a unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques; coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units; and insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding. It describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers. This book will appeal to microelectronics engineers, as well as material technologists, and physicists working in industrial and academic research and development.