Semiconductor Devices: Physics and Technology

This is a basic introduction to the physical properties of semiconductor devices and the latest fabrication technology. The book presents the theoretical and practical aspects of every step in device fabrication, with an emphasis on integrated circuits. Divided into three parts, it covers the basic properties of semiconductors and processes, emphasizing silicon and gallium arsenide - the physics and characteristics of semiconductor devices, bipolar and unipolar devices, and special microwave and photonic devices - and the latest processing technologies, from crystal growth to lithographic pattern transfer.