Ion Implantation Technology 2010: 18th International Conference on Ion Implantation Technology IIT 2010 (AIP Conference Proceedings / Materials Physics and Applications)
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📖 Description
The proceedings of 18th International conference on Ion Implantation Technology (IIT2010) covers all aspect of ion implantation, from the fundamentals of ion-solid interactions to industrial applications of the latest implantation machines and device manufacturing.