Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology)

Name: Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology)
Author: John E.J. Schmitz
ISBN: 9780815512882

AuthorJohn E.J. Schmitz

PublisherWilliam Andrew

CategoryComputers

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Book Details

Author(s)John E.J. Schmitz

PublisherWilliam Andrew

ISBN / ASIN0815512880

ISBN-139780815512882

CategoryComputers

MarketplaceUnited States 🇺🇸

Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology)

Book Details

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