Diazonaphthoquinonebased Resists (SPIE Tutorial Texts in Optical Engineering Vol. TT11)

This book elucidates the reasons underlying the lasting success of DNQ/N resist systems by examining the correlation between the chemical structure of the components and the photoresist performance. The basic chemistries of both DNQ sensitizers and novolak resins are explored. Focus also is placed on the chemical basis of application-related facets of the lithographic process. Methods of increasing process performance, such as image reversal, top layer imaging, antireflection layers, and phase shift technology are treated.

Contents

- Preface to the Series
- Table of Contents
- Preface
- Introduction
- Basic Chemistry of DNQ/Novolak Resists
- Basic Chemistry of Novolaks
- DNQ/Novolak Interactions
- Step-by-step View of the Lithographic Process
- Advanced Processing Schemes for DNQ Resists
- Outlook on DNQ/Novolak Systems