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Micromachined Devices and Components 23 24 October 1995: 23-24 October, 1995, Austin, Texas (Proceedings of Spie--the International Society for Optical Engineering, V. 2642.)

Name: Micromachined Devices and Components 23 24 October 1995: 23-24 October, 1995, Austin, Texas (Proceedings of Spie--the International Society for Optical Engineering, V. 2642.)
Author: National Institute of Standards and Technology (U. S.)
ISBN: 9780819420084