Selected Papers on Resolution Enhancement Techniques in Optical Lithography (SPIE Milestone Series Vol. MS178)

Optical lithography for integrated circuits is undergoing a renaissance with the adoption of Resolution Enhancement Technology (RET). Some RET concepts have become routine in manufacturing. This volume gathers together seminal RET papers.

Contents

- Preface
- Resolution and Lithography
- Moore's Law
- Optical Process/Proximity Correction (OPC)
- Phase-Shifting Masks (PSM)
- Off-Axis Illumination (OAI)
- Computer-Aided Design (CAD)
- Other Resolution Enhancement Techniques