Texture evolution in metal nitride (aluminum nitride, titanium nitride, hafnium nitride) thin films prepared by off-normal incidence reactive magnetron sputtering .
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Book Details
Author(s)
Derya Deniz
Publisher
Proquest, Umi Dissertation Publishing
ISBN / ASIN
1243597003
ISBN-13
9781243597007
Marketplace
France 🇫🇷
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