Vacuum: Engineering & Applications

VACUUM : Engineering & Applications - is an inter-disciplinary subject, embracing aspects of mechanical and cryogenic engineering and materials technology while having a broad foundation in physics. This book aims to give readers a firm foundation of fundamental knowledge about the subject and the ability to apply it. This book is an introductory text on how to use vacuum techniques. It provides a good grounding in the basic principles and concepts that underlie the production and measurement of vacuum. The authors describe how these are applied in vacuum systems and explain the most important practical aspects of the operation of a large variety of pumps, components and measuring gauges. The organization of topics is kept in such a way to fulfill the curriculum needs of cryogenic engineers completely and vacuum physicists to a maximum. In addition, this book tries to satisfy the needs of industrialist working in vacuum equipment and instruments such as TEM, spectrometer, PVD and thin films.