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Surface Chemical Cleaning and Passivation for Semiconductor Processing: Symposium Held April 13-15, 1993, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)

Name: Surface Chemical Cleaning and Passivation for Semiconductor Processing: Symposium Held April 13-15, 1993, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)
Author: Greg S. Higashi, Eugene A. Irene
ISBN: 9781558992139

AuthorGreg S. Higashi, Eugene A. Irene

PublisherMaterials Research Society

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Book Details

Author(s)Greg S. Higashi, Eugene A. Irene

PublisherMaterials Research Society

ISBN / ASIN1558992138

ISBN-139781558992139

MarketplaceFrance 🇫🇷

Description

Book by Higashi, Greg S., Irene, Eugene A.