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Microsystem Technology

Name: Microsystem Technology
Author: Wolfgang Menz, JÃ¼rgen Mohr, Oliver Paul
ISBN: 9783527296347

Author Wolfgang Menz, JÃ¼rgen Mohr, Oliver Paul

Publisher Wiley-VCH

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Book Details

Author(s) Wolfgang Menz, JÃ¼rgen Mohr, Oliver Paul

Publisher Wiley-VCH

ISBN / ASIN 3527296344

ISBN-13 9783527296347

Sales Rank #5,189,884

Marketplace United States 🇺🇸

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Description

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.