Gate Dielectrics and MOS ULSIs: Principles, Technologies and Applications (Springer Series in Electronics and Photonics)
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Book Details
Author(s)
Takashi Hori
Publisher
Springer
ISBN / ASIN
3540631828
ISBN-13
9783540631828
Sales Rank
#6,000,264
Category
Technology & Engineering
Marketplace
United States 🇺🇸
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Description
Gate Dielectrics focusses on dielectric films satisfying the superior quality gate dielectric even in large-scale integration. The information presented is rather up to date with regard to nanometer-range ultrathin gate-dielectric films, which are indispensible for submicrometer ULSIs.
