Design and Analysis of Electro-Thermal Micro Actuator and Gripper

This book presents a final year project work of a group of BTech Students worked under the guidance of the author. In this work, multilayered electro thermal micro actuators, which consist of Ti, SiO2 and Poly Si layers, have been analyzed for their deflection, temperature, force and stress. Three different designs of micro actuators have been analyzed in this work, which are solid cantilever actuator, slotted cantilever U-type actuator and slotted cantilever V-type actuator. Using the best performing design an attempt has been made to design a micro gripper which has been further analyzed for its opening, temperature, force and stress.