TiO2 nano-structured thin film layer shell oxygen sensor(Chinese Edition)

Paperback. Pub Date :2013-11-01 Pages: 137 Publisher: Heilongjiang University Press TiO2 nano-structured thin film layer shell oxygen sensor nano-TiO2 film as excellent electrical properties of sphere-sensitive film heterostructure design use SiTiO2 pn junction TiO2 electrode substrate oxygen sensor. Preparation of TiO2 nano-sphere diameter finished at around 250nm. structural integrity. Adsorption improved to meet the measured gas. the structural characteristics to obtain good sensitivity of the gas. TiO2 nano-structured thin film layer shell oxygen sensor discusses the effects of using nano technology and CMOS MEMS technology combined Ti02 nano-layer shell structure films produced oxygen sensor. the sensor can be used heterostructure electrical transmission and detection of nanoshells to achieve O2 . Contents: Chapter 1 Overview 1.1 semiconductor gas sensor gas sensor rese...