RF MEMS and Their Applications

The incorporation of mems based fabrication technologies into micro and millimeter wave systems offers viable routes to ics with mems actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. Varadan's book will be the first of it's kind to address this increasingly important area and highlights the overlapping information requirements of the rf and mems research and development communities.table of contents:prefacemicroelectromechanical systems (mems) and radio frequency memsmems materials and fabrication techniquesrf mems switches and micro relaysmems inductors and capacitorsmicro machined rf filtersmicro machined phase shiftersmicro machined transmission lines and componentsmicro machined antennaeintegration and packaging for rf mems devicesindex