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Simulation and Optimization of a Vertical MOCVD Reactor for the Epitaxial Growth of GaN on Silicon

Name: Simulation and Optimization of a Vertical MOCVD Reactor for the Epitaxial Growth of GaN on Silicon
Author: Yungeng Gao
ISBN: 978B0006RB7A7

AuthorYungeng Gao

Publisherdistributed by American Institute of Chemical Engineers]

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Book Details

Author(s)Yungeng Gao

Publisherdistributed by American Institute of Chemical Engineers]

ISBN / ASINB0006RB7A4

ISBN-13978B0006RB7A7

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