Measurement and modeling of solvent removal for spin coating.: An article from: Polymer Engineering and Science

This digital document is an article from Polymer Engineering and Science, published by Society of Plastics Engineers, Inc. on April 15, 1996. The length of the article is 4532 words. The page length shown above is based on a typical 300-word page. The article is delivered in HTML format and is available in your Amazon.com Digital Locker immediately after purchase. You can view it with any web browser.

From the author: Solvent concentration is an important factor for spin-coated film planarization. Two techniques, one an on-line optical method and the other an off-line gel permeation chromatography method, have been used to investigate the coating concentration change during spinning. The experimental observations are compared with the spin-coating model predictions. The modeled concentration and thickness are in close agreement with experiment. Under certain conditions, the spin-coating model can be significantly simplified. These conditions are discussed.

Citation Details
Title: Measurement and modeling of solvent removal for spin coating.
Author: J. Gu
Publication:Polymer Engineering and Science (Refereed)
Date: April 15, 1996
Publisher: Society of Plastics Engineers, Inc.
Volume: v36 Issue: n7 Page: p1019(8)

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