ISO/TR 19319:2003, Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral ... area, and sample area viewed by the analyser
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Description
ISO/TR 19319:2003 provides information for measuring (1) the lateral resolution, (2) the analysis area, and (3) the sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.
