Clean room exhaust energy recovery optimization design.(Report): An article from: ASHRAE Transactions

This digital document is an article from ASHRAE Transactions, published by American Society of Heating, Refrigerating, and Air-Conditioning Engineers, Inc. on January 1, 2010. The length of the article is 3823 words. The page length shown above is based on a typical 300-word page. The article is delivered in HTML format and is available immediately after purchase. You can view it with any web browser.

From the author: The general exhaust system of a clean room for hi-tech fabrication plants (FABs) contains a great deal of energy for make-up air handling units (MAUs) for pre-cooling and preheating usage. The present study employed a concept of the second law of thermodynamics analysis to optimize the design of a compact heat exchanger installed in a MAU, based on a specified external dimension and a fixed inlet temperature and mass flow rate for the hot and cold sides of the exchanger. Results indicate that an appropriate compact heat exchanger can be sized on the basis of the second law of thermodynamics analysis within minimum entropy production (or irreversibility), caused by both temperature difference and pressure drop. The optimized compact heat exchanger in this study can save 5 and 12% of the energy for pre-cooling and pre-heating in the MAU, respectively.

Citation Details
Title: Clean room exhaust energy recovery optimization design.(Report)
Author: James J.M. Tsao
Publication:ASHRAE Transactions (Magazine/Journal)
Date: January 1, 2010
Publisher: American Society of Heating, Refrigerating, and Air-Conditioning Engineers, Inc.
Volume: 116 Issue: 1 Page: 81(6)

Article Type: Report

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