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Scaleable Process for CVD of Large-Area Heteroepitaxial Beta Sic on Tic(x) Using Gases with 1:1 Silicon to Carbon Stoichiometry

Name: Scaleable Process for CVD of Large-Area Heteroepitaxial Beta Sic on Tic(x) Using Gases with 1:1 Silicon to Carbon Stoichiometry
Author: Richard Koba
ISBN: 978B00DD7BLK5

AuthorRichard Koba

PublisherPN

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Book Details

Author(s)Richard Koba

PublisherPN

ISBN / ASINB00DD7BLKA

ISBN-13978B00DD7BLK5

Sales Rank99,999,999

MarketplaceUnited States 🇺🇸