Magnetron sputtering system. Kn. 1. Introduction to the physics and technology of magnetron sputtering / Magnetronnye raspylitelnye sistemy. Kn. 1. Vvedenie v fiziku i tekhniku magnetronnogo raspyleniya

Name: Magnetron sputtering system. Kn. 1. Introduction to the physics and technology of magnetron sputtering / Magnetronnye raspylitelnye sistemy. Kn. 1. Vvedenie v fiziku i tekhniku magnetronnogo raspyleniya
Author: A. Kuzmichev
ISBN: 9789668934070

Author A. Kuzmichev

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Book Details

Author(s)A. Kuzmichev

PublisherAvers

ISBN / ASIN9668934075

ISBN-139789668934070

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