DC Magnetron Reactive Sputtering of Low Stress AlN Piezoelectric Thin Films for MEMS Application

Name: DC Magnetron Reactive Sputtering of Low Stress AlN Piezoelectric Thin Films for MEMS Application
Author: Peter Y. Hsieh
ISBN: 978B00J4FP8T2

Author Peter Y. Hsieh

Publisher PN

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Book Details

Author(s)Peter Y. Hsieh

PublisherPN

ISBN / ASINB00J4FP8T0

ISBN-13978B00J4FP8T2

Sales Rank99,999,999

MarketplaceUnited States 🇺🇸